Serial Nanofabrication

In addition to parallel processing methods, serial nanofabrication strategies are also developed, largely with the objective to increase spatial resolution. The instruments that have been used most successfully for serial nanofabrication and characterization are derived from imaging techniques: the scanning electron microscope (SEM) equipped for EBL, the AFM for DPN and nanografting, and the NSOM. These instruments are quickly becoming indispensable tools to manipulate, deposit, view, and modify materials, at the nanoscale.

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